摘 要：硫化铅因具有高载流子迁移率、高光吸收系数等出色的光电特性，所以在光电探测领域备受关注。文章通过化学浴沉积（CBD）的方法合成了高质量硫化铅薄膜，并基于厚度约为 500 nm 的硫化铅薄膜构建了光电探测器。光电测试表明该器件具有从 365 ～ 1 650 nm 的宽光谱响应。进一步的光电特性分析表明，该器件在光强为 18.6 μW cm-2 的 1 050 nm 光照下，响应度和增益高达 9.56 A W-1 和 11.32，为低成本宽光谱的光电探测器的发展提供了一个有利的平台。
关键词：化学浴沉积；PbS 薄膜；宽光谱；光电探测器
DOI:10.19850/j.cnki.2096-4706.2022.16.017
中图分类号：TN15 文献标识码：A 文章编号：2096-4706（2022）16-0062-04
Broad Spectrum Photodetector Based on PbS Film
WANG Yue
(School of Microelectronics, Hefei University of Technology, Hefei 230009, China)
Abstract: PbS has attracted much attention in the field of photodetection owing to its perfect photoelectric properties such as high carrier mobility and high optical absorption coefficient and so on. This paper synthesizes high-quality PbS films by the method of Chemical Bath Deposition (CBD), and constructs the photodetector based on PbS film with a thickness of about 500 nm. The Photoelectric test shows that the device has a broad spectral response from 365 to 1 650 nm. Further photoelectric characteristic analysis shows that the device has a high responsivity and gain up to 9.56 A W-1 and 11.32 upon 1 050 nm illumination at the light intensity of 18.6 μW cm-2 , which provides a favorable platform for the development of low cost and wide spectrum photodetectors.
Keywords: chemical bath deposition; PbS film; broad spectrum; photodetector
参考文献：
[1] LEE J W，KIM D Y，BAEK S，et al. Inorganic UVVisible-SWIR Broadband Photodetector Based on Monodisperse PbS Nanocrystals [J].Small，2016，12（10）：1328-1333.
[2] CHENG W，TANG L，XIANG J，et al. An extreme highperformance ultraviolet photovoltaic detector based on a ZnO nanorods/ phenanthrene heterojunction [J].RSC Advances，2016，6（15）：12076-12080.
[3] PHURUANGRAT A，THONGTEM S，THONGTEM T， et al. Sonochemical synthesis and characterization of lead sulfide nanoparticles [J].Digest Journal of Nanomaterials and Biostructures， 2012，7（4）：1413-1417.
[4] TOHIDI T，JAMSHIDI-GHALEH K，NAMDAR A，et al. Comparative studies on the structural，morphological，optical，and electrical properties of nanocrystalline PbS thin films grown by chemical bath deposition using two different bath compositions [J].Materials Science in Semiconductor Processing，2014，25：197-206.
[5] WANG B，ZHANG C，ZENG B，et al. Fabrication of Addressable Perovskite Film Arrays for High-Performance Photodetection and Real-Time Image Sensing Application [J].J Phys Chem Lett，2021，12（11）：2930-2936.
[6] WU C Y，ZHU H，WANG M，et al. Controlled synthesis of GaSe microbelts for high-gain photodetectors induced by the electron trapping effect [J].Journal of Materials Chemistry C，2020，8（16）：5375-5379.
作者简介：王悦（1995.08—），男，汉族，安徽淮北人，硕士研究生，研究方向：电子材料与器件。