摘 要：ESD 是指“静电释放”。静电是一种客观的自然现象，不均匀分布在芯片本身、人体和机器上以及芯片能够存在的环境及周围的事物上。这些静止的电荷随时都可能通过某种方式释放出来。静电释放的特点是高电压、低电量、小电流和作用时间短。随着电子学系统和集成电路，比如专用集成电路（ASIC）或“片上系统（SOC）”的复杂度增加，测试和分析集成电路对静电释放的防护能力是非常重要的。该文将介绍集成电路产品基于 MK.1TE 测试系统的 ESD 测试方法和分析。
关键词：静电放电；ESD；MK.1TE 测试系统；ESD 击穿的临界电压
DOI:10.19850/j.cnki.2096-4706.2021.18.010
基金项目：广东省重大科技专项（2018B01 0115002、2019B010140002）
中图分类号：TN40 文献标识码：A 文章编号：2096-4706（2021）18-0035-05
Analysis of Chip Electrostatic Discharge (ESD) Test Based on MK.1TE Test System
LYU Youcheng1 , CHEN Zhongyong1 , NIE Fanyu1 , YE Wujian2
(1.Guangzhou Xinghai Integrated Circuit Center Co., Ltd., Guangzhou 510006, China; 2.Guangdong University of Technology, Guangzhou 510006, China)
Abstract: ESD refers to “electrostatic discharge”. Static electricity is an objective natural phenomenon, which is unevenly distributed in the chip itself, human body and machine, as well as the environment and surrounding things where the chip can exist. These static charges may be released in some way at any time. Electrostatic discharge is characterized by high voltage, low electric quantity, small current and short action time. With the increasing complexity of electronic systems and integrated circuits, such as specific integrated circuits (ASIC) or “system on chip (SOC)”, it is very important to test and analyze the protection ability of integrated circuits against electrostatic discharge. This paper will introduce the ESD test method and analysis of integrated circuit products based on MK.1TE test system.
Keywords: electrostatic discharge; ESD; MK.1TE test system; critical voltage of ESD breakdown
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作者简介：吕友成（1990—），男，汉族，广西南宁人，测试工程师，本科，研究方向：芯片测试验证；陈仲永（1983—）， 男，汉族，广东阳江人，系统工程师，研究方向：集成电路系统验证；聂帆宇（1991—），男，汉族，江西抚州人，技术中心副总经 理，硕士研究生，研究方向：芯片设计、测试验证项目管理；叶武剑（1987—），男，汉族，广东韶关人，讲师，博士研究生，研究 方向：计算机体系结构深度学习。