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电极Al层加厚对水平结构LED芯片性能的影响
马介渊,殷榆婷,周婷
(1.西安联创生物医药孵化器有限公司,陕西 西安 710077; 2.西安市碑林区创意产业发展有限公司,陕西 西安 710068)
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摘  要:随着水平结构LED市场的竞争越来越残酷,提高产品性能和质量成为各芯片大厂的当务之急。本文在水平结构LED上制备了4种不同Al层厚度的Cr/Al/Cr/Au结构电极,通过比对其电压、亮度和可靠性发现:2500Å-7500Å范围内,Al层厚度每增大1000Å,LED的电压会降低约0.01V,且亮度和可靠性不变;当Al层厚度增大到10000 Å以上时,Al层侧面出现无Au覆盖缺口,电极Al层容易被氧化、腐蚀,周围出现黑色鼓包异常,对LED的电压、亮度和可靠性造成毁灭性影响。


关键词:水平结构LED;电极;Al层


作者介绍:

马介渊(1982.05-),男,陕西西安人,硕士,中级工程师。研究方向:LED、半导体。


中图分类号:TN406;TM923.34     文献标识码:A 文章编号:2096-4706(2018)01-0000-02

The Influence of the Al LayerThickening on the Performance of the Horizontal Structure LED Chip

MAJieyuan1,YIN Yuting1,ZHOU Ting2

(1.Xi'an BIO-pharmaceutical Incubator Co.Ltd.,Xi'an  710077,China;

2.Beilin District of Xi'an Creative Industry Development Co.Ltd.,Xi'an  710068,China)

AbstractAs thecompetition in the horizontal structure LED market becomes more and more cruel,how to improve product performance and quality become the priorityof each chip maker. In this paper,four kinds of Cr/Al/Cr/Austructure electrodes with different Al layer thicknesses were fabricated on LEDwith horizontal structure. By comparing their voltage,luminanceand reliability,it was found that in the range of 2500Åto7500Å,the LED voltage were reduced by about 0.01V witheach increase of 1000 Å thickness of Allayer,and thebrightness and reliability remain unchanged. When the thickness of Al layer wasincreased to more than 10000 Å,there was some gap withoutAu covered on the side of the Al layer,and the Al layerof the electrode was easily oxidized and corroded,resultingin the black drum around,which wouldhave a devastating effect on the voltage,the brightnessand the reliability of the LED.

KeywordshorizontalstructureLED;electrical pad;Al layer


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