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信息化应用21年10期

FMCS 系统在微电子产业工程项目中的应用实践
马杰
(青岛青咨工程咨询有限公司,山东 青岛 266100)

摘  要:制造微电子产品的科技含量高,对专业生产系统的可靠性要求高,引入 FMCS 系统有助于实施精准控制。通过对某微电子产业园项目设计、施工阶段 FMCS 系统与厂房子系统结合应用的研究,对整个系统进行尽可能全面地论述,采用自动化控制理论分析与项目实际应用枚举等方法手段,提纲挈领,让该领域工程一线的专业技术人员对该类项目管理有较为全面的认知。在我国推进工业信息化、产业智能化的背景下,FMCS 系统符合国家发展战略,同时具备成熟的技术应用条件。


关键词:FMCS 系统;洁净厂房;微电子产业;工程实践;电子装备制造与自动化



DOI:10.19850/j.cnki.2096-4706.2021.10.036


中图分类号:TP29                                          文献标识码:A                                 文章编号:2096-4706(2021)10-0138-04


Application Practice of FMCS System in Microelectronics Industry Engineering Project

MA Jie

(Qingdao Qingzi Engineering Consulting Co.,Ltd.,Qingdao 266100,China)

Abstract:The manufacturing of microelectronic products has high scientific and technological content and high requirements for the reliability of professional production systems. The introduction of FMCS system helps to implement accurate control. Through the research on the combined application of FMCS system and plant house subsystem in the design and construction stage of a microelectronic industrial park project,the whole system is discussed as comprehensively as possible,and the methods and means such as automatic control theoretical analysis and project practical application enumeration are used to outline,so that the professional and technical personnel in the front line of engineering in this field can have a more comprehensive understanding of this kind of project management. Under the background of industrial informatization and industrial intelligence advocated by China,FMCS system meets the national development strategy and has mature technical application conditions.

Keywords:FMCS system;clean workshop;microelectronics industry;engineering practice;electronic equipment manufacturing and automation


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作者简介:马杰(1985—),男,汉族,山东青岛人,高级经 济师,硕士,研究方向:电子装备制造与自动化。