摘 要：在石油、化工企业，以及地下燃气管道、加油站等地方，容易存在可燃气体泄露的隐患。传统的方法是用催化燃烧气敏元件来检测可燃气体的泄露，随着智能物联网的发展，越来越多的研究者研究MEMS 可燃气体传感器。MEMS 可燃气体传感器是采用微机械加工技术制造出来的新型传感器。与传统传感器相比，它不但具有体积小、重量轻、成本低、功耗低、稳定性好、适于批量化生产、易于集成等特点，而且实现了智能化、多功能化。
关键词：催化燃烧；MEMS；传感器
中图分类号：TP150.99 文献标识码：A 文章编号：2096-4706（2018）10-0179-03
Catalytic Combustion Gas Sensor Based on MEMS Technology
MA Li，SONG Hongbin，WANG Lei，YANG Mei
（Jinan Changqing Computer Application Co.，Ltd.，Jinan 250306，China）
Abstract：There is a risk of gas leakage in industrial enterprises，oil factories，underground gas pipelines，gas stations andother place. Traditional catalytic combustion gas sensor is used to detect the leakage of combustible gas. With the development ofintelligent internet of things，more and more researchers are studying MEMS combustible gas sensor. MEMS combustible gas sensoris a new kind of sensor made by micromachining technology. Compared with the traditional sensor，it has the characteristics of smallsize，light weight，low cost，low power consumption，good stability，suitable for mass production，easy integration，intelligentand multi-functional.
Keywords：catalytic combustion；MEMS；sensor
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作者简介：马丽（1985-），女，汉族，山东聊城人，硕士，研究方向：气体传感器研发。