摘 要：创新实践教学对集成电路（IC）专业研究生人才培养极其重要。文章根据 CMOS 图像传感器像素与 NMOS 器件在结构上的相似性，通过科教融合设计了创新实例用于 IC 工艺技术课的研究生教学，取得了较好的效果。该教学改革一方面激发了学生的学习兴趣、调动了他们自主学习该课的积极性，另一方面在创新实践教学中加深了学生对该课基础知识的理解，培养了他们的创新实践能力。
关键词：科教融合；IC 工艺技术；研究生教学；创新实践
DOI:10.19850/j.cnki.2096-4706.2021.14.048
基金项目：天津大学研究生创新人才培养 项目（YCX202048，YCX202161）
中图分类号：TN4；G643.2 文献标识码：A 文章编号：2096-4706（2021）14-0182-04
Research on Design of IC Process Technology Graduate Teaching Innovative Examples
WANG Xiuyu, XU Jiangtao, GAO Zhiyuan, NIE Kaiming, GAO Jing
(School of Microelectronics, Tianjin University, Tianjin 300072, China)
Abstract: Innovative practice teaching is very important for the cultivation of graduate students majoring in integrated circuit (IC). According to the structural similarity between CMOS image sensor pixels and NMOS devices, this paper designs an innovative example through science and education integration, which is used in the graduate teaching of IC process technology course, and has achieved good results. On the one hand, the teaching reform has stimulated students’ interest in learning and mobilized their enthusiasm to study the course independently. On the other hand, it has deepened students’ understanding of the basic knowledge of the course and cultivated their innovative practice ability in innovative practice teaching.
Keywords: integration of science and education; IC process technology; postgraduate teaching; innovative practice
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作者简介：王秀宇（1978—），男，汉族，安徽阜阳人，副教授，博士，研究方向：微电子与固体电子教学科研。